SEDL / STP / STP975-EB / STP42104S

Air Cleanliness Validation for Cleanrooms

Flannery, James L.
the National Operations Manager, ENV Services, Inc., King of Prussia, PA

Walcroft, James P.
the Systems Operations Manager, ENV Services, Inc., King of Prussia, PA

Pages: 12    Published: Jan 1986

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Abstract

Cleanroom air cleanliness validation is becoming increasingly important with the further miniaturization and susceptibility of products to airborne contamination. The rational for validation discussed, both for particle counting and for other testing. The documents covering cleanroom air validation are described, as is the general topic of “room classification.” Topics covered include validation methodology, testing modes, and room types. Factors affecting air cleanliness are discussed as well as other testing procedures to characterize cleanroom performance.