SEDL / STP / STP430-EB / STP41830S

New Applications of Electron Probe Microanalysis

Brown, J. D.
professor, Faculty of Engineering Science, University of Western Ontario, London, Ontario

Pages: 29    Published: Jan 1968

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Abstract

New and established applications of the electron probe microanalyzer are reviewed. A dominant theme apparent in recent publications is the complementary use of information from other analytical techniques with compositional data from the electron probe microanalyzer. The established applications which include the analysis of precipitates and inclusions, phase identification, homogeneity determinations, and diffusion studies are discussed, with emphasis on recent work. The analysis of low atomic number elements, very small quantities of materials, and thin films along with the applications to semiconductor technology are the important new areas of application during the past three years. Another important trend in the application of the electron probe microanalyzer is the rise of auxiliary techniques. Thus cathodoluminescence, sample currents, and Kossel microdiffraction studies are becoming important adjuncts in the analysis of microvolumes.