SEDL / STP / STP699-EB / STP38661S

Summary

Davis, LE
symposium cochairman and coeditor, Physical Electronics Division, Perkin Elmer Corp., Eden Prairie, Minn.

Pages: 3    Published: Jan 1980

Download this paper for $25 PDF (40K)          View License Agreement
Abstract

As stated in the introduction, these proceedings were focused on the applied aspects of surface analysis as it is used in practical investigations today. The primary surface analysis techniques described in this volume are Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS or ESCA), secondary ion mass spectrometry (SIMS), and ion scattering spectroscopy (ISS). Articles describing this instrumentation include treatments of instrumental calibration, data handling, and signal processing. The reader also will find that most authors agree that, when more than one of the techniques is used to characterize a single surface, a synergism is possible that cannot be established with a single analytical technique.