Energy Dispersion X-ray Analysis with the Transmission Electron Microscope

    Published: Jan 1971

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    The addition of X-ray emission analysis capabilities to a conventional transmission electron microscope offers a new analytical dimension to the microscopist.

    The availability of Si(Li) solid-state X-ray detectors with energy resolutions superior to any previous type of X-ray detector provides the microscopist with an efficient system for elemental analysis that does not interfere with normal microscope operation.

    A commercially available Si(Li) detector has been installed on a transmission electron microscope capable of forming a 1.6-µm-diameter spot at the specimen plane with the following characteristics of operation (a) X-radiation from the specimen, the specimen holder, the mounting grid, and the objective aperture (if in place) are the only signals detected; (b) no degradation of detector resolution by the magnetic fields of the microscope lenses or the proximity of the incident electron beam to the detector (a few millimeters) is observed; and (c) X-ray signals from particles 1000 Å in diameter are detectable with peak-to-background ratios of about two.


    transmission, electron microscopy, X-ray spectroscopy, semiconductor devices, extraction, replicas, thin films, particle beams, electron diffraction, solid state devices, X-ray analysis, scattering, dispersing, resolution, spectrochemical analysis

    Author Information:

    Bender, SL
    Research chemist and analytical chemist, Kennecott Copper Corp., Lexington, Mass.

    Duff, RH
    Research chemist and analytical chemist, Kennecott Copper Corp., Lexington, Mass.

    Committee/Subcommittee: E04.11

    DOI: 10.1520/STP38574S

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