STP485: Energy Dispersion X-ray Analysis with the Transmission Electron Microscope

    Bender, SL
    Research chemist and analytical chemist, Kennecott Copper Corp., Lexington, Mass.

    Duff, RH
    Research chemist and analytical chemist, Kennecott Copper Corp., Lexington, Mass.

    Pages: 17    Published: Jan 1971


    The addition of X-ray emission analysis capabilities to a conventional transmission electron microscope offers a new analytical dimension to the microscopist.

    The availability of Si(Li) solid-state X-ray detectors with energy resolutions superior to any previous type of X-ray detector provides the microscopist with an efficient system for elemental analysis that does not interfere with normal microscope operation.

    A commercially available Si(Li) detector has been installed on a transmission electron microscope capable of forming a 1.6-µm-diameter spot at the specimen plane with the following characteristics of operation (a) X-radiation from the specimen, the specimen holder, the mounting grid, and the objective aperture (if in place) are the only signals detected; (b) no degradation of detector resolution by the magnetic fields of the microscope lenses or the proximity of the incident electron beam to the detector (a few millimeters) is observed; and (c) X-ray signals from particles 1000 Å in diameter are detectable with peak-to-background ratios of about two.


    transmission, electron microscopy, X-ray spectroscopy, semiconductor devices, extraction, replicas, thin films, particle beams, electron diffraction, solid state devices, X-ray analysis, scattering, dispersing, resolution, spectrochemical analysis

    Paper ID: STP38574S

    Committee/Subcommittee: E04.11

    DOI: 10.1520/STP38574S

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