SEDL / STP / STP485-EB / STP38566S

X-Ray Energy Spectrometry in the 0.1 to 10 Å Range

Fitzgerald, R
Lecturer, Applied Physics and Information Science, University of California, San Diego, Calif

Gantzel, P
Chemist, Gulf General Atomic Incorporated, San Diego, Calif

Pages: 33    Published: Jan 1971

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Abstract

Energy spectrometry utilizing a solid-state detector (silicon) for X-ray elemental analysis is described, and compared with wavelength spectrometry.

Parameters which influence the spectrometers energy resolution, energy detection range, and countrate capabilities are reviewed. Measured performance of a spectrometer (200 eV FWHM resolution for 6.404 keV radiation) is demonstrated for both X-ray and electron specimen excitation.