Nitrogen trifluoride (NF³) is a widely used electronic specialty gas and is considered about 1.5 times more oxidizing than gaseous oxygen. A recent test program was sponsored by seven companies that are heavily involved in the worldwide industrial distribution and use of NF³ to develop several test systems and materials compatibility data for the most common metals and nonmetals utilized in NF³ transfer systems. This paper presents the data developed by the Industry steering group on the compatibility of 12 metallic materials and 15 nonmetallic materials with NF³. The flammability of metallic materials were evaluated by their promoted combustion threshold pressure and the nonmetallic materials were evaluated by their autogenous ignition temperature (AIT) and NF³-index for sustained combustion.