STP1479

    Materials Compatibility with Nitrogen Trifluoride (NF3)

    Published: Jan 2006


      Format Pages Price  
    PDF (7.4M) 16 $25   ADD TO CART
    Complete Source PDF (5.7M) 16 $86   ADD TO CART


    Abstract

    Nitrogen trifluoride (NF3) is a widely used electronic specialty gas and is considered about 1.5 times more oxidizing than gaseous oxygen. A recent test program was sponsored by seven companies that are heavily involved in the worldwide industrial distribution and use of NF3 to develop several test systems and materials compatibility data for the most common metals and nonmetals utilized in NF3 transfer systems. This paper presents the data developed by the Industry steering group on the compatibility of 12 metallic materials and 15 nonmetallic materials with NF3. The flammability of metallic materials were evaluated by their promoted combustion threshold pressure and the nonmetallic materials were evaluated by their autogenous ignition temperature (AIT) and NF3-index for sustained combustion.

    Keywords:

    Nitrogen trifluoride (NF, 3, ), promoted combustion, oxygen index, autogenous ignition temperature


    Author Information:

    Newton, BE
    Vice President, Research and Development and Test Facility Manager, Wendell Hull and Associates Inc., Las Cruces, NM

    Chiffoleau, GJA
    Vice President, Research and Development and Test Facility Manager, Wendell Hull and Associates Inc., Las Cruces, NM


    Paper ID: STP37664S

    Committee/Subcommittee: G04.02

    DOI: 10.1520/STP37664S


    CrossRef ASTM International is a member of CrossRef.