SYMPOSIA PAPER Published: 01 January 2006
STP37664S

Materials Compatibility with Nitrogen Trifluoride (NF )

Source

Nitrogen trifluoride (NF3) is a widely used electronic specialty gas and is considered about 1.5 times more oxidizing than gaseous oxygen. A recent test program was sponsored by seven companies that are heavily involved in the worldwide industrial distribution and use of NF3 to develop several test systems and materials compatibility data for the most common metals and nonmetals utilized in NF3 transfer systems. This paper presents the data developed by the Industry steering group on the compatibility of 12 metallic materials and 15 nonmetallic materials with NF3. The flammability of metallic materials were evaluated by their promoted combustion threshold pressure and the nonmetallic materials were evaluated by their autogenous ignition temperature (AIT) and NF3-index for sustained combustion.

Author Information

Newton, BE
Wendell Hull and Associates Inc., Las Cruces, NM
Chiffoleau, GJA
Wendell Hull and Associates Inc., Las Cruces, NM
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Details
Developed by Committee: G04
Pages: 334–349
DOI: 10.1520/STP37664S
ISBN-EB: 978-0-8031-5513-8
ISBN-13: 978-0-8031-3405-8