Optical Properties of Hydrogenated Amorphous Carbon (a-C:H) - a Hard Coating for IR-Optical Elements

    Published: Jan 1983

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    Hydrogenated amorphous carbon films a-C:H were deposited on glass and germanium substrates. The films are transparent in the IR and are extremely hard (Mohs's hardness of about 8). The a-C:H coatings were prepared according to the method of Holland in an RF excited discharge sustained by various hydrocarbon gases.

    Thickness, density, refractive index (at 0.3 μm and 2 – 10 μm) and relative hydrogen content were determined. Variations in IR-refractive index and relative hydrogen content could be correlated with deposition conditions. With a refractive index of approximately 2 a-C:H is an ideal AR-coating for germanium (n = 4). Laser calorimetric measurements of optical absorption at 10.6 μm give a loss as low as 4% for a 1.3 μm thick coating on germanium (λ/4 for n = 2 at 10.6 μm). Preliminary damage tests with a CO2 laser (600 W, cw) were performed.


    amorphous hydrogenated carbon, AR coating, germanium, hard coating, infrared, laser calorimetry, plasma deposition

    Author Information:

    Bubenzer, A
    Fraunhofer-Institut für Angewandte Festkörperphysik, Freiburg,

    Dischler, B
    Fraunhofer-Institut für Angewandte Festkörperphysik, Freiburg,

    Nyaiesh, A
    Fraunhofer-Institut für Angewandte Festkörperphysik, Freiburg,

    Paper ID: STP37273S

    Committee/Subcommittee: F01.02

    DOI: 10.1520/STP37273S

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