SEDL / STP / STP799-EB / STP37261S

Degradation of Dielectric Films by XeF Excimer Intermediates

Loudiana, M
Washington State University, Pullman, Washington,

Schmid, A
Washington State University, Pullman, Washington,

Dickinson, JT
Washington State University, Pullman, Washington,

Pages: 7    Published: Jan 1983

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Abstract

Many excimer laser designs require optical component surfaces to be in contact with both optical radiation and reactive components of the gain medium. The resulting environmental degradation of coatings on mirrors or windows is analyzed by isolating intermediates from the XeF gain medium and measuring quantitatively corrosive interaction between these species and the dielectric surfaces. Particular attention will be given to SiO² films whose reaction with XeF² and NF² with and without additional stimulation by ions will be surveyed. Temperature effects of the film substrate as well as the importance of synergistic effects for the stability of the SiO² coatings will be discussed.