SEDL / STP / STP799-EB / STP37241S

Polarization Monitor For Thin Film Depositions

Tirri, B
Perkin-Elmer Corporation, Wilton, CT

Pages: 9    Published: Jan 1983

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Abstract

An automatic ellipsometer has been designed, fabricated and integrated into a large vacuum chamber to monitor the deposition of multilayer phase retarders. This technique offers several advantages over conventional monitoring techniques. Precise control of the phase retardance properties of multilayer coatings is possible due to the sensitivity of the ellipsometric parameters Δ and ψ to the changes in film thickness. Phase measurements of several multilayer coating designs deposited using this monitoring technique are presented.