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Large-Diameter Czochralski Silicon Crystal Growth Pages: 15 Published: Jan 1983
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View License Agreement Source: STP804-EB Abstract Some practical aspects of the engineering and science of large-diameter crystal growth are presented. Growth characteristics and problems associated with thermal stress and crystal shape are discussed. Oxygen distribution in the melt and its incorporation into the crytal are investigated. Finally, a double-crucible technique is presented and its application to N+ silicon growth is discussed. Keywords: silicon, crystal growth, Czochralski growth, large-diameter silicon, oxygen in crystals, double-crucible technique Paper ID: STP36157S Committee/Subcommittee: F01.06 DOI: 10.1520/STP36157S ASTM International is a member of CrossRef. | ||