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Large-Diameter Czochralski Silicon Crystal Growth

Lin, W
Member of Technical Staff,Semiconductor Materials Group, Bell Laboratories,Pa.,

Hill, DW
Member of Technical Staff,Semiconductor Materials Group, Bell Laboratories,Pa.,


Pages: 15    Published: Jan 1983


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Source: STP804-EB


Abstract

Some practical aspects of the engineering and science of large-diameter crystal growth are presented. Growth characteristics and problems associated with thermal stress and crystal shape are discussed. Oxygen distribution in the melt and its incorporation into the crytal are investigated. Finally, a double-crucible technique is presented and its application to N+ silicon growth is discussed.


Keywords:
silicon, crystal growth, Czochralski growth, large-diameter silicon, oxygen in crystals, double-crucible technique

Paper ID: STP36157S
Committee/Subcommittee: F01.06
DOI: 10.1520/STP36157S
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