Published: Jan 1978
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A new, semiautomatic interferogram evaluation technique is discussed. The technique format is based on an interference pattern displayed on a closed-circuit television monitor.
Comparative results using this technique, a computer evaluation, and several manual techniques, including the ASTM Interpretation of Interferograms of Nominally Plane Wavefronts (F 529-77 T), are presented.
interferograms, interferometry, interferogram evaluation, optical metrology
Director of engineering, the Zygo Corp., Middlefield, Conn.
Paper ID: STP33968S