Director of engineering, the Zygo Corp., Middlefield, Conn.
Pages: 12 Published: Jan 1978
A new, semiautomatic interferogram evaluation technique is discussed. The technique format is based on an interference pattern displayed on a closed-circuit television monitor.
Comparative results using this technique, a computer evaluation, and several manual techniques, including the ASTM Interpretation of Interferograms of Nominally Plane Wavefronts (F 529-77 T), are presented.
interferograms, interferometry, interferogram evaluation, optical metrology
Paper ID: STP33968S