STP666: A New, Semiautomatic Interferogram Evaluation Technique

    Zanoni, CA
    Director of engineering, the Zygo Corp., Middlefield, Conn.

    Pages: 12    Published: Jan 1978


    A new, semiautomatic interferogram evaluation technique is discussed. The technique format is based on an interference pattern displayed on a closed-circuit television monitor.

    Comparative results using this technique, a computer evaluation, and several manual techniques, including the ASTM Interpretation of Interferograms of Nominally Plane Wavefronts (F 529-77 T), are presented.


    interferograms, interferometry, interferogram evaluation, optical metrology

    Paper ID: STP33968S

    Committee/Subcommittee: F01.02

    DOI: 10.1520/STP33968S

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