SYMPOSIA PAPER Published: 01 January 1978
STP33968S

A New, Semiautomatic Interferogram Evaluation Technique

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A new, semiautomatic interferogram evaluation technique is discussed. The technique format is based on an interference pattern displayed on a closed-circuit television monitor.

Comparative results using this technique, a computer evaluation, and several manual techniques, including the ASTM Interpretation of Interferograms of Nominally Plane Wavefronts (F 529-77 T), are presented.

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Zanoni, CA
the Zygo Corp., Middlefield, Conn.
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Details
Developed by Committee: F01
Pages: 29–40
DOI: 10.1520/STP33968S
ISBN-EB: 978-0-8031-4733-1
ISBN-13: 978-0-8031-0709-0