Published: Jan 1978
| ||Format||Pages||Price|| |
|PDF (232K)||12||$25||  ADD TO CART|
|Complete Source PDF (3.5M)||12||$55||  ADD TO CART|
A new, semiautomatic interferogram evaluation technique is discussed. The technique format is based on an interference pattern displayed on a closed-circuit television monitor.
Comparative results using this technique, a computer evaluation, and several manual techniques, including the ASTM Interpretation of Interferograms of Nominally Plane Wavefronts (F 529-77 T), are presented.
interferograms, interferometry, interferogram evaluation, optical metrology
Director of engineering, the Zygo Corp., Middlefield, Conn.
Paper ID: STP33968S