SEDL / STP / STP955-EB / STP33866S

Depth Profiling of Hydrogen Isotopes Implanted into TiC Crystals

Sato, K
Associate professor, Miyagi National College of Technology, Natori 981-12,

Yamaguchi, S
Professor, Institute for Materials Research, Tohoku University, Sendai 980,

Fujino, Y
Associate professor, Tohoku University, Sendai 980,

Pages: 9    Published: Jan 1987

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Abstract

The concentration depth profiles of hydrogen isotopes implanted into titanium carbide (TiC^x) specimens in the composition range of x = 0.50 to 0.96 have been measured using the elastic recoil detection analysis. The retention behavior of the implanted deuterium changes with the specimen composition; the deuteriums deposit near the projected range, and a saturation is eventually reached for the specimens with the composition close to stoichiometric TiC, while for the specimens with off-stoichiometric compositions they diffuse very fast away from the near surface region to the interior to attain the saturation. The experimental data of retention and isotopic replacement are compared with a simple model of local saturation and replacement.