You are being redirected because this document is part of your ASTM Compass® subscription.
    This document is part of your ASTM Compass® subscription.


    The Electron Microprobe as a Metallographic Tool

    Published: Jan 1974

      Format Pages Price  
    PDF (956K) 51 $25   ADD TO CART
    Complete Source PDF (7.9M) 51 $73   ADD TO CART


    The electron microprobe (EMP) is an electron optical instrument in which compositional and topographic information are obtained from regions ⩽1μm in diameter on a specimen. Photographs of compositional and topographic changes in 1-mm2to 20-μm2 areas on various types of specimens can also be obtained which are strikingly similar to optical photomicrographs. This paper discusses the various signals that are measured in the EMP (X-rays, secondary electrons, backscattered electrons, etc.), their resolution, and the types of information that can be obtained. In addition to elemental analysis, the solid state detector and scanning techniques will be discussed. The last sections will cover characterization of phases-homogeneity-trace element analysis-quantitative metallography and various techniques which extend the instrument capabilities such as deconvolution and soft X-ray analysis. Various applications will be discussed and illustrated.


    metallography X-ray spectra, quantitative analysis, electron probe, spectroscopy, resolution, background, microanalysis, X-ray spectrometers, solid state counters, trace element analysis, homogeneity

    Author Information:

    Goldstein, JI
    Associate professor, Lehigh University, Bethlehem, Pa.

    Committee/Subcommittee: E04.11

    DOI: 10.1520/STP33331S

    CrossRef ASTM International is a member of CrossRef.