Applications Manager of Bio-Rad, Digilab Division, Cambridge, MA
Pages: 6 Published: Jan 1984
Fourier transform infrared spectroscopy can be used for the rapid determination of the boron and phosphorus concentrations in borophosphosilicate glass films. A multicomponent matrix algebraic method is used in this procedure. Results of the measurements on a number of BPSG samples are presented and the factors affecting the accuracies of the measurements are discussed.
FT-IR, borophosphosilicate glass films, silicon
Paper ID: STP32666S