Simultaneous Determination of the Boron and Phosphorus Content in Silicate Glasses by FT IR Spectroscopy

SEDL / STP / STP850-EB / STP32666S

Simultaneous Determination of the Boron and Phosphorus Content in Silicate Glasses by FT-IR Spectroscopy

Krishnan, K
Applications Manager of Bio-Rad, Digilab Division, Cambridge,MA

Pages: 6 Published: Jan 1984

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Source: STP850-EB

Abstract

Fourier transform infrared spectroscopy can be used for the rapid determination of the boron and phosphorus concentrations in borophosphosilicate glass films. A multicomponent matrix algebraic method is used in this procedure. Results of the measurements on a number of BPSG samples are presented and the factors affecting the accuracies of the measurements are discussed.

Keywords:
FT-IR, borophosphosilicate glass films, silicon

Paper ID: STP32666S
Committee/Subcommittee: F01.06
DOI: 10.1520/STP32666S

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