SEDL / STP / STP911-EB / STP28989S

Alumina/Silica Multilayer Coatings for Excimer Lasers

Foltyn, SR
Los Alamos National Laboratory, Los Alamos, NM

Jolin, LJ
Los Alamos National Laboratory, Los Alamos, NM

Pages: 6    Published: Jan 1985

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Abstract

The coating parameter that most strongly influences optical damage resistance is the choice of materials used to produce a component. During the course of testing of hundreds of ultraviolet reflectors involving 12 different material combinations, multilayer stacks of Al²O³/SiO² have demonstrated a superior ability to resist laser-induced damage. Further, damage thresholds for these coatings are at least twice as high as for reflectors composed of other materials: In particular, thresholds of 6 J/cm² at 248 nm (15 ns) and 12 J/cm² at 351 nm (12 ns) have been measured. Comparative results are presented for a variety of materials at both wavelengths as are preliminary results for alumina-based antireflective coatings.