STP911

    Alumina/Silica Multilayer Coatings for Excimer Lasers

    Published: Jan 1985


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    Abstract

    The coating parameter that most strongly influences optical damage resistance is the choice of materials used to produce a component. During the course of testing of hundreds of ultraviolet reflectors involving 12 different material combinations, multilayer stacks of Al2O3/SiO2 have demonstrated a superior ability to resist laser-induced damage. Further, damage thresholds for these coatings are at least twice as high as for reflectors composed of other materials: In particular, thresholds of 6 J/cm2 at 248 nm (15 ns) and 12 J/cm2 at 351 nm (12 ns) have been measured. Comparative results are presented for a variety of materials at both wavelengths as are preliminary results for alumina-based antireflective coatings.

    Keywords:

    Al, 2, O, 3, coating materials, excimer optics, laser-induced damage, multilayer dielectric reflectors, ultraviolet reflectors


    Author Information:

    Foltyn, SR
    Los Alamos National Laboratory, Los Alamos, NM

    Jolin, LJ
    Los Alamos National Laboratory, Los Alamos, NM


    Paper ID: STP28989S

    Committee/Subcommittee: F01.19

    DOI: 10.1520/STP28989S


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