STP911

    Phase Shift Variations on HEL Mirrors

    Published: Jan 1985


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    Abstract

    An automated IR ellipsometer was used to measure the ellipsometric parameters, ψ and Δ, on multilayer mirrors at 3.80 μm. Spatial variations in differential phase shift, Δ, are modeled by thickness variations in the multilayer coating and variations in ψ are modeled by an absorption change.

    Keywords:

    infrared ellipsometry, phase shift, optical coating uniformity, FILM program


    Author Information:

    Leonard, TA
    University of Dayton Research Institute, Dayton, Ohio

    Loomis, JS
    University of Dayton Research Institute, Dayton, Ohio


    Paper ID: STP28985S

    Committee/Subcommittee: F01.19

    DOI: 10.1520/STP28985S


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