SEDL / STP / STP911-EB / STP28985S



Phase Shift Variations on HEL Mirrors

Leonard, TA
University of Dayton Research Institute, Dayton, Ohio

Loomis, JS
University of Dayton Research Institute, Dayton, Ohio


Pages: 7    Published: Jan 1985


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Abstract

An automated IR ellipsometer was used to measure the ellipsometric parameters, ψ and Δ, on multilayer mirrors at 3.80 μm. Spatial variations in differential phase shift, Δ, are modeled by thickness variations in the multilayer coating and variations in ψ are modeled by an absorption change.


Keywords:
infrared ellipsometry, phase shift, optical coating uniformity, FILM program

Paper ID: STP28985S
Committee/Subcommittee: F01.19
DOI: 10.1520/STP28985S
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