Published: Jan 1985
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Complex dielectric coatings, with up to forty-three layers have been deposited using RF diode sputtering techniques. Deposition parameters have been established for ZrO2, SiO2 and Al2O3. Fabrication consistency has been high in both material properties and spectral response, and the coatings have shown useful damage, loss and environmental attributes, for laser applications, in the realms so far investigated.
environmental stability, Excimer laser mirrors, infrared dichroics, monitoring accuracy, rf sputtering, thin film polarizers
Burleigh Northwest Optical, Inc., Fishers, NY