Development of RF Sputtered Laser Coatings at Burleigh Northwest

SEDL / STP / STP911-EB / STP28980S

Development of RF-Sputtered Laser Coatings at Burleigh Northwest

Lunt, DLJ
Burleigh Northwest Optical, Inc., Fishers, NY

Pages: 5 Published: Jan 1985

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Abstract

Complex dielectric coatings, with up to forty-three layers have been deposited using RF diode sputtering techniques. Deposition parameters have been established for ZrO², SiO² and Al²O³. Fabrication consistency has been high in both material properties and spectral response, and the coatings have shown useful damage, loss and environmental attributes, for laser applications, in the realms so far investigated.

Keywords:
environmental stability, Excimer laser mirrors, infrared dichroics, monitoring accuracy, rf sputtering, thin film polarizers

Paper ID: STP28980S
Committee/Subcommittee: F01.19
DOI: 10.1520/STP28980S

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