Published: Jan 1988
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State-of-the-art technologies in the semiconductor industry require exotic processing techniques using unusual, hazardous chemicals. The very nature of some of these chamicals makes it necessary to very carefully select protective clothing to assure the protection of the worker.
Selection techniques are described for safety glasses, side shields, goggles, visitors' goggles, face shields; ear protection; respirators, in-line air breathing equipment, self-contained breathing apparatus; gloves—acid, solvent and heat-resistant as well as disposable types; oversleeves; aprons; head protection; footwear; and protective suits. Properties of materials—strength, permeability, durability, and impact resistance as well as chemical resistance—must be considered. Finally, recommendations for personal protective equipment to be used in the semiconductor industry are offered. Included will be an overall list of suggested equipment and possible suppliers.
hazardous chemicals, personal protective equipment (PPE), electronic component operations, III-V chemistry, single-crystal ingots, photo-resist, vapor prime, diffusion, in-process gases, head protection, hearing protection, eye/face protection, respiratory protection, hand protection, foot protection, body protection, layering, training, self-contained breathing apparatus (SCBA)
Senior engineer, environmental safety and health consultant, AT&T, Reading, PA