SEDL / STP / STP990-EB / STP26054S

Electrical Characterization of Electrically Active Surface Contaminants by Epitaxial Encapsulation

Derheimer, A
Electrical Characterization R and D Engineermanager of Materials Characterization R and DVice-President of TechnologyTechnical Service Manager, SEH AmericaShin Etsu Handotai Company, LDT, VancouverGunma, Wash.

Takamizawa, S
Electrical Characterization R and D Engineermanager of Materials Characterization R and DVice-President of TechnologyTechnical Service Manager, SEH AmericaShin Etsu Handotai Company, LDT, VancouverGunma, Wash.

Matlock, JH
Electrical Characterization R and D Engineermanager of Materials Characterization R and DVice-President of TechnologyTechnical Service Manager, SEH AmericaShin Etsu Handotai Company, LDT, VancouverGunma, Wash.

Mollenkopf, H
Electrical Characterization R and D Engineermanager of Materials Characterization R and DVice-President of TechnologyTechnical Service Manager, SEH AmericaShin Etsu Handotai Company, LDT, VancouverGunma, Wash.

Pages: 13    Published: Jan 1989

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Abstract

Electrically active contaminants have been successfully detected on the surface of substrates using an epitaxial layer for encapsulation. P-type <100> wafers were deliberately contaminated with phosphorus and aluminum. The substrates were then subjected to a modified epitaxial growth cycle to preserve the contaminant on the surface High frequency C-V dopant profiles were performed, and electrically active contaminants were detected.