STP990

    Particulate Cleanliness Testing of Filters and Equipment in Process Fluids

    Published: Jan 1989


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    Abstract

    Filters and equipment components used in critical semiconductor process lines must be accurately evaluated for particulate cleanliness. This requires accurate test methods, particle counting instruments, testing apparati, and careful analysis of data. This paper describes these criteria and how they can be applied.

    Keywords:

    Particulate cleanliness, cleanliness testing, particle counting, and filter cleanliness


    Author Information:

    Goldsmith, SH
    Director of EngineeringPresident, Inter Basic Resources, Inc., Ann Arbor, MI

    Grundelman, GP
    Director of EngineeringPresident, Inter Basic Resources, Inc., Ann Arbor, MI


    Paper ID: STP26041S

    Committee/Subcommittee: F01.10

    DOI: 10.1520/STP26041S


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