Digital Library / STP / STP990-EB / STP26041S

Particulate Cleanliness Testing of Filters and Equipment in Process Fluids
Goldsmith, SH
Director of Engineering, Inter Basic Resources, Inc., MI

Grundelman, GP

Pages: 8    Published: Jan 1989

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Source: STP990-EB

Abstract

Filters and equipment components used in critical semiconductor process lines must be accurately evaluated for particulate cleanliness. This requires accurate test methods, particle counting instruments, testing apparati, and careful analysis of data. This paper describes these criteria and how they can be applied.

Keywords:
Particulate cleanliness, cleanliness testing, particle counting, and filter cleanliness

Paper ID: STP26041S
Committee/Subcommittee: F01.10
DOI: 10.1520/STP26041S
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