Digital Library / STP / STP990-EB / STP26031S

Epitaxial Silicon Quality Improvement by Automatic Surface Inspection
Ruprecht, DJ
Monsanto Electronic Materials Company, Missouri

Hellwig, LG

Rossi, JA

Pages: 9    Published: Jan 1989

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Source: STP990-EB

Abstract

With increasing demands on epitaxial wafer surface quality, automated inspection is necessary. The results from automatic wafer inspection equipment are ambiguous without careful examination of the detected defects. To facilitate microscopic verification of automatically detected defects, we have designed a system for matching flaw counts to actual defects. Using this system, the epitaxial deposition process has been optimized to reduce surface defects.

Keywords:
silicon epitaxy, defect inspection, microscopic inspection, automated inspection, surface quality

Paper ID: STP26031S
Committee/Subcommittee: F01.06
DOI: 10.1520/STP26031S
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