SEDL / STP / STP990-EB / STP26031S

Epitaxial Silicon Quality Improvement by Automatic Surface Inspection

Ruprecht, DJ
Monsanto Electronic Materials Company, Saint Peters, Missouri

Hellwig, LG
Monsanto Electronic Materials Company, Saint Peters, Missouri

Rossi, JA
Monsanto Electronic Materials Company, Saint Peters, Missouri

Pages: 9    Published: Jan 1989

Download this paper for $25 PDF (132K)          View License Agreement
Abstract

With increasing demands on epitaxial wafer surface quality, automated inspection is necessary. The results from automatic wafer inspection equipment are ambiguous without careful examination of the detected defects. To facilitate microscopic verification of automatically detected defects, we have designed a system for matching flaw counts to actual defects. Using this system, the epitaxial deposition process has been optimized to reduce surface defects.