STP990: The Effect of a Rotational Magnetic Field on MCZ Crystal Growing

    Yamashita, K
    research scientistsresearch scientistexecutive technical consultant, Kyushu Electronic Metal Co.,LtdSumitomo Metal Industry Co.,LtdOsaka Titanium Co.,Ltd, Kohokucho, SagaAmagasaki, HyogoAmagasaki, Hyogo,

    Kobayashi, S
    research scientistsresearch scientistexecutive technical consultant, Kyushu Electronic Metal Co.,LtdSumitomo Metal Industry Co.,LtdOsaka Titanium Co.,Ltd, Kohokucho, SagaAmagasaki, HyogoAmagasaki, Hyogo,

    Aoki, T
    research scientistsresearch scientistexecutive technical consultant, Kyushu Electronic Metal Co.,LtdSumitomo Metal Industry Co.,LtdOsaka Titanium Co.,Ltd, Kohokucho, SagaAmagasaki, HyogoAmagasaki, Hyogo,

    Kawata, Y
    research scientistsresearch scientistexecutive technical consultant, Kyushu Electronic Metal Co.,LtdSumitomo Metal Industry Co.,LtdOsaka Titanium Co.,Ltd, Kohokucho, SagaAmagasaki, HyogoAmagasaki, Hyogo,

    Shiraiwa, T
    research scientistsresearch scientistexecutive technical consultant, Kyushu Electronic Metal Co.,LtdSumitomo Metal Industry Co.,LtdOsaka Titanium Co.,Ltd, Kohokucho, SagaAmagasaki, HyogoAmagasaki, Hyogo,

    Pages: 11    Published: Jan 1989


    Abstract

    Czochralski(CZ) crystal growth under the vertical D.C. magnetic field with and without the horizontal rotating field is investigated by the numerical analysis and experiment.

    The numerical analysis shows that the vertical magnetic field increases the effective segregation coefficient of phosphorus and the oxygen content of the grown crystal, and the horizontal rotating magnetic field is useful to decreases the oxygen content. This is due to the activation of convection flow in the meridional plane in the crucible by the rotating magnetic field. The experimental results of the effective segregation coefficient of phosphorus and oxygen content under the vertical magnetic field with and without horizontal rotating magnetic field verify the calculated results.

    Keywords:

    VMCZ, rotating magnetic field, segregation coefficient, oxygen concentration, melt convection


    Paper ID: STP26025S

    Committee/Subcommittee: F01.06

    DOI: 10.1520/STP26025S


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