SEDL / STP / STP960-EB / STP25798S

Wafer Fab Automation, an Integral Part of the CAM Environment

Fiorletta, CA
Vice President and General ManagerVice President and Product ManagerMarketing Manager, Veeco Integrated Automation (VIA)Veeco Instruments Ltd, Dallas, Texas

Lennard, R
Vice President and General ManagerVice President and Product ManagerMarketing Manager, Veeco Integrated Automation (VIA)Veeco Instruments Ltd, Dallas, Texas

Harper, JG
Vice President and General ManagerVice President and Product ManagerMarketing Manager, Veeco Integrated Automation (VIA)Veeco Instruments Ltd, Dallas, Texas

Pages: 9    Published: Jan 1987

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Abstract

A flexible/wafer fab automation system has been developed to perform three basic functions; real time inventory control, material distribution throughout the fab; and automated loading of cassette-to-cassette process machines. This System consists of Automated Guided Vehicles (AGV's) for material transport, intelligent inventory control stations for management of material in queue, and a central computer control for System management and communications to the factory's CAM system.

The wafer fab of the future must have real time control of the manufacturing environment. This includes planning and scheduling of Work In Process, dynamic monitoring of material movement, interactive communications with the process machines and control of the automation system. This interaction permits Just In Time delivery of material to process equipment, and constant monitoring of lots in process. The benefits of an integrated system are lower manufacturing costs, lower inventory levels, shorter cycle time and higher yields.