STP960: Applications of x-ray Fluorescence Analysis to the Thin Layer on Silicon Wafers

    Shiraiwa, T
    research scientistsresearch scientistsresearch scientists, Osaka Titanium Co.Kyushu Electric Metal Co.Rigaku Industrial Co., HyogoSagaTakatsuki, Osaka,

    Ochiai, T
    research scientistsresearch scientistsresearch scientists, Osaka Titanium Co.Kyushu Electric Metal Co.Rigaku Industrial Co., HyogoSagaTakatsuki, Osaka,

    Sano, M
    research scientistsresearch scientistsresearch scientists, Osaka Titanium Co.Kyushu Electric Metal Co.Rigaku Industrial Co., HyogoSagaTakatsuki, Osaka,

    Tada, Y
    research scientistsresearch scientistsresearch scientists, Osaka Titanium Co.Kyushu Electric Metal Co.Rigaku Industrial Co., HyogoSagaTakatsuki, Osaka,

    Arai, T
    research scientistsresearch scientistsresearch scientists, Osaka Titanium Co.Kyushu Electric Metal Co.Rigaku Industrial Co., HyogoSagaTakatsuki, Osaka,

    Pages: 13    Published: Jan 1987


    Abstract

    Thin layered materials on silicon wafer were analyzed with X-ray fluorescent spectrometer which is specially designed for the analysis of semiconductor devices. The spectrochemical analysis using hard X-rays (22Ti - 92U) can be applied to the thicker layered materials (0.5 – 50µm). By soft and ultrasoft X-rays (5B - 21Sc), thinner layered materials (0 – 2µm) can be analyzed for the determination of concentration of layered material and film thickeness. In analysis of SiO2 Layer, the intensity of O-Kα X-ray was measured and the thickness was calculated by the theoretical approach. The precision of measurement is a few percent and it can distinguish the difference of natural oxide according to the cleaning method. Other experimental results of typical silicon wafer samples are informed; which are the analysis of NSG, PSG, BPSG, metal and alloy films, and As or P implanted elements.

    Keywords:

    X-ray fluorescence, oxide layer analysis, BPSG, PSG, Silicon wafer


    Paper ID: STP25796S

    Committee/Subcommittee: F01.11

    DOI: 10.1520/STP25796S


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