SEDL / STP / STP960-EB / STP25786S

Comparison of Impurity Profiles Generated by Spreading Resistance Probe and Secondary Ion Mass Spectrometry

Sweeney, GG
senior scientistsMotorola Inc., Mesa, AZ

Alvarez, TR
senior scientistsMotorola Inc., Mesa, AZ

Pages: 14    Published: Jan 1987

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Abstract

Silicon wafers, implanted with As or BF², were subjected to isochronal anneals and the resulting impurity profiles were measured with both spreading resistance probe (SRP) and secondary ion mass spectrometry (SIMS). The two measurements converged as the anneal temperature was increased. This is to be expected as SRP measures the electrically active impurity concentration, while SIMS measures the atomic concentration of the impurity present. An anomalous kink in the BF² profile observed in SIMS measurements was not present in the SRP measurement. Junction depths measured by SRP were consistently shallower than measurements made by SIMS. The SRP and SIMS profiles were compared to those profiles simulated with SUPREM, a process modeling computer program.