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    Particle and Material Control Automation System for VLSI Manufacturing

    Published: Jan 1987

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    This paper describes a practical automation system for integrated circuit fabrication combining the SMIF (Standard Mechanical InterFace) concept with a new approach to material control. SMIF implementation is shown to provide a cost effective clean environment and a unique opportunity for information management automation. Each SMIF port acts as a material “gateway”, controlling lot processing via data attached directly to the SMIF pod. Misprocessing is eliminated, particulate contamination is reduced, and productivity is improved.


    Standard Mechanical Interface (SMIF), material control, contamination control, clean room technology, automation

    Author Information:

    Brain, MD
    project manager responsible for material control projects, Asyst Technologies, Inc., Fremont, California

    Committee/Subcommittee: F01.06

    DOI: 10.1520/STP25780S

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