SEDL / STP / STP960-EB / STP25780S

Particle and Material Control Automation System for VLSI Manufacturing

Brain, MD
project manager responsible for material control projects, Asyst Technologies, Inc., Fremont, California

Pages: 9    Published: Jan 1987

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Abstract

This paper describes a practical automation system for integrated circuit fabrication combining the SMIF (Standard Mechanical InterFace) concept with a new approach to material control. SMIF implementation is shown to provide a cost effective clean environment and a unique opportunity for information management automation. Each SMIF port acts as a material “gateway”, controlling lot processing via data attached directly to the SMIF pod. Misprocessing is eliminated, particulate contamination is reduced, and productivity is improved.