SEDL / STP / STP643-EB / STP25607S

Secondary Ion Mass Spectrometry and Auger Electron Spectroscopy Semiquantitative Analysis of Metal Alloys

Davis, LE
Director, Analytical Laboratory, and project scientist, Research and Development, Physical Electronics Industries, Inc., Eden Prairie, Minn

Gerlach, RL
Director, Analytical Laboratory, and project scientist, Research and Development, Physical Electronics Industries, Inc., Eden Prairie, Minn

Pages: 5    Published: Jan 1978

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Abstract

Secondary ion mass spectroscopy (SIMS) and Auger electron spectroscopy (AES) data were obtained for metal alloys of known bulk composition. The measurements were made from the same surface regions of the alloys and then compared to measurements of elemental standards to facilitate quantitative analysis. The SIMS data were obtained with and without a residual oxygen base pressure to investigate the role of oxygen enhancement in determining surface composition. Compositions of a nimonic and lead-bronze alloy as determined by AES and SIMS were compared and the differences discussed in terms of secondary ion yields and sputtering effects.