STP643

    Secondary Ion Mass Spectrometry and Auger Electron Spectroscopy Semiquantitative Analysis of Metal Alloys

    Published: Jan 1978


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    Abstract

    Secondary ion mass spectroscopy (SIMS) and Auger electron spectroscopy (AES) data were obtained for metal alloys of known bulk composition. The measurements were made from the same surface regions of the alloys and then compared to measurements of elemental standards to facilitate quantitative analysis. The SIMS data were obtained with and without a residual oxygen base pressure to investigate the role of oxygen enhancement in determining surface composition. Compositions of a nimonic and lead-bronze alloy as determined by AES and SIMS were compared and the differences discussed in terms of secondary ion yields and sputtering effects.

    Keywords:

    quantitative analysis, materials, alloys, Auger electrons, spectroscopy, mass spectrometry


    Author Information:

    Davis, LE
    Director, Analytical Laboratory, and project scientist, Research and Development, Physical Electronics Industries, Inc., Eden Prairie, Minn

    Gerlach, RL
    Director, Analytical Laboratory, and project scientist, Research and Development, Physical Electronics Industries, Inc., Eden Prairie, Minn


    Paper ID: STP25607S

    Committee/Subcommittee: E42.05

    DOI: 10.1520/STP25607S


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