SEDL / STP / STP1038-EB / STP24433S

Comparative Study of Reactively Evaporated vs. Ion-Plated TiO² Thin Films

Guenther, KH
Center for Applied Optics University of Alabama, Huntsville,

Loo, B
Center for Applied Optics University of Alabama, Huntsville,

Pulker, HK
Center for Applied Optics University of Alabama, Huntsville,

Saxer, A
Center for Applied Optics University of Alabama, Huntsville,

Seitel, SC
Center for Applied Optics University of Alabama, Huntsville,

Pages: 1    Published: Jan 1988

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Abstract

Single-layer thin films of TiO² deposited on glass substrates by means of standard reactive evaporation (from a boat) and by means of the novel deposition technique of ion-plating were characterized with a transmission electron microscope, a Raman microprobe, a thermal deflection spectrometer, and a Talystep stylus-type surface profiling instrument. With each deposition technique, single-layer coatings of different thicknesses were produced, from one QWOT up to 12 QWOT @ 633 nm). The thickness dependence of microstructure, surface roughness, and absorption for the two groups of coatings will be presented, together with laser damage threshold measurements at 532 nm.