SYMPOSIA PAPER Published: 01 January 1991
STP23660S

Excimer Laser Optics

Source

For optical materials, mirrors and antireflection coatings the laser damage resistance results for XeCl, KrF, ArF excimer laser wavelengths are presented.

Author Information

Morozov, NV
Sagitov, SI
Sergeyev, PB
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Details
Developed by Committee: F01
Pages: 557–564
DOI: 10.1520/STP23660S
ISBN-EB: 978-0-8031-5179-6
ISBN-13: 978-0-8194-0532-6