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SEDL / STP / STP1141-EB / STP23660S
Excimer Laser Optics
Morozov, NV P.N. Lebedev Physical Institute, Moscow,
Sagitov, SI P.N. Lebedev Physical Institute, Moscow,
Sergeyev, PB P.N. Lebedev Physical Institute, Moscow,
Pages: 8 Published: Jan 1991
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Abstract
For optical materials, mirrors and antireflection coatings the laser damage resistance results for XeCl, KrF, ArF excimer laser wavelengths are presented.
Paper ID: STP23660S
Committee/Subcommittee: F01.19
DOI: 10.1520/STP23660S
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