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Excimer Laser Optics Pages: 8 Published: Jan 1991
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View License Agreement Source: STP1141-EB Abstract For optical materials, mirrors and antireflection coatings the laser damage resistance results for XeCl, KrF, ArF excimer laser wavelengths are presented. Keywords: Paper ID: STP23660S Committee/Subcommittee: F01.19 DOI: 10.1520/STP23660S ASTM International is a member of CrossRef. | ||