STP1141: Excimer Laser Optics

    Morozov, NV
    P.N. Lebedev Physical Institute, Moscow,

    Sagitov, SI
    P.N. Lebedev Physical Institute, Moscow,

    Sergeyev, PB
    P.N. Lebedev Physical Institute, Moscow,

    Pages: 8    Published: Jan 1991


    Abstract

    For optical materials, mirrors and antireflection coatings the laser damage resistance results for XeCl, KrF, ArF excimer laser wavelengths are presented.


    Paper ID: STP23660S

    Committee/Subcommittee: F01.19

    DOI: 10.1520/STP23660S


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