SEDL / STP / STP1141-EB / STP23660S

Excimer Laser Optics

Morozov, NV
P.N. Lebedev Physical Institute, Moscow,

Sagitov, SI
P.N. Lebedev Physical Institute, Moscow,

Sergeyev, PB
P.N. Lebedev Physical Institute, Moscow,

Pages: 8    Published: Jan 1991

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Abstract

For optical materials, mirrors and antireflection coatings the laser damage resistance results for XeCl, KrF, ArF excimer laser wavelengths are presented.