STP1141

    Excimer Laser Optics

    Published: Jan 1991


      Format Pages Price  
    PDF Version (264K) 8 $25   ADD TO CART
    Complete Source PDF (19M) 8 $88   ADD TO CART


    Abstract

    For optical materials, mirrors and antireflection coatings the laser damage resistance results for XeCl, KrF, ArF excimer laser wavelengths are presented.


    Author Information:

    Morozov, NV
    P.N. Lebedev Physical Institute, Moscow,

    Sagitov, SI
    P.N. Lebedev Physical Institute, Moscow,

    Sergeyev, PB
    P.N. Lebedev Physical Institute, Moscow,


    Paper ID: STP23660S

    Committee/Subcommittee: F01.19

    DOI: 10.1520/STP23660S


    CrossRef ASTM International is a member of CrossRef.