Digital Library / STP / STP1141-EB / STP23660S

Excimer Laser Optics
Morozov, NV
P.N. Lebedev Physical Institute,

Sagitov, SI

Sergeyev, PB

Pages: 8    Published: Jan 1991

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Source: STP1141-EB

Abstract

For optical materials, mirrors and antireflection coatings the laser damage resistance results for XeCl, KrF, ArF excimer laser wavelengths are presented.

Keywords:


Paper ID: STP23660S
Committee/Subcommittee: F01.19
DOI: 10.1520/STP23660S
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