SEDL / STP / STP1141-EB / STP23641S

Highly Damage-Resistant Reflectors for 248 nm Formed by Fluorides Multilayers

Izawa, T
Showa Optical Co., Ltd., Kanagawa,

Yamamura, N
Showa Optical Co., Ltd., Kanagawa,

Uchimura, R
Showa Optical Co., Ltd., Kanagawa,

Hashimoto, I
Showa Optical Co., Ltd., Kanagawa,

Yakuoh, T
Showa Optical Co., Ltd., Kanagawa,

Owadano, Y
Showa Optical Co., Ltd., Kanagawa,

Matsumoto, Y
Showa Optical Co., Ltd., Kanagawa,

Yano, M
Showa Optical Co., Ltd., Kanagawa,

Pages: 6    Published: Jan 1991

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Source: STP1141-EB

Abstract

We investigated the laser damage thresholds and optical performances of fluorides multilayered reflectors, consisting of middle index fluoride and Na³AlF⁶ for high power KrF laser applications. It was found the damage thresholds of those reflectors are significantly improved by laser annealing. Those reflectors with annealing resisted against the fluence of 18 – 27 J/cm² (This fluence varies on combinations of various fluorides) for 248 nm, 15 nsec, 10 Hz pulses.

Keywords:
Laser damage, Fluorides multilayered reflector, Laser annealing

Paper ID: STP23641S
Committee/Subcommittee: F01.02
DOI: 10.1520/STP23641S
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