SYMPOSIA PAPER Published: 01 January 1991
STP23635S

Multishot Ablation of Thin Films: Sensitive Detection of Film/Substrate Transition by Shockwave Monitoring

Source

During multishot ablation with 248 nm excimer laser pulses, for each single laser shot the shock wave emerging from the ablated material was monitored by the acoustic mirage effect. The Shockwave parameters turned out to depend sensitively on the nature of the ablated material. In particular during ablation of a polymeric film/SiO2/Si multilayer system, distinct changes in the deflection signal were found when the ablation was driven through the interface between layers. Inspection by optical microscopy and depth profiling was used as cross check.

Author Information

Hunger, E
Petzoldt, S
Pietsch, H
Reif, J
Matthias, E
Price: $25.00
Contact Sales
Related
Reprints and Permissions
Reprints and copyright permissions can be requested through the
Copyright Clearance Center
Details
Developed by Committee: F01
Pages: 283–286
DOI: 10.1520/STP23635S
ISBN-EB: 978-0-8031-5179-6
ISBN-13: 978-0-8194-0532-6