SYMPOSIA PAPER Published: 01 January 1991
STP23629S

Morphology and Laser Damage Studies by Atomic Force Microscopy of E-Beam Evaporation Deposited AR and HR Coatings

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Atomic Force Microscopy is a powerful tool for exploring the surface morphology of dielectric thin film coatings. We have demonstrated the utility of this tool in monitoring processing defects, laser conditioning and aging, and laser damage in e-beam evaporation deposited AR and HR coatings with a resolution not previously available.

Author Information

Tesar, AA
Balooch, M
Shotts, KW
Siekhaus, WJ
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Details
Developed by Committee: F01
Pages: 228–236
DOI: 10.1520/STP23629S
ISBN-EB: 978-0-8031-5179-6
ISBN-13: 978-0-8194-0532-6