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Subsurface Polishing Damage of Fused Silica: Nature and Effect on Laser Damage of Coated Surfaces
Tesar, AA
Lawrence Livermore National Laboratory, CA

Brown, NJ

Taylor, JR

Stolz, CJ

Pages: 19    Published: Jan 1991

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Source: STP1141-EB

Abstract

The nature of subsurface damage incurred during polishing of fused silica varies greatly with the polishing process. Although subsurface damage is known to lower laser damage thresholds for fused silica surfaces1,2, the effect on thresholds of coated dielectric surfaces has not been previously documented. This study describes features of subsurface damage due to polishing by ten commercial fabricators and compares laser damage thresholds of a high reflection coating on these surfaces.

Keywords:


Paper ID: STP23623S
Committee/Subcommittee: F01.19
DOI: 10.1520/STP23623S
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