SEDL / STP / STP954-EB / STP23110S

High-Precision Damage-Resistant Multiple-Pass Ultraviolet Reflectometer

Jolin, LJ
University of California, Los Alamos, NM

Foltyn, SR
University of California, Los Alamos, NM

Pages: 8    Published: Jan 1986

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Abstract

A multiple-pass cell was reported by John White in 1942 [1]. Since then, it has been adapted for use as a high-precision reflectometer. The multiple-pass reflectometer has been studied and reported by Arnon and Baumeister [2].

Here, a reflectometer which is similar is described. It utilizes a uv laser operating at λ = 351 nm as the source and the White-cell mirrors are high-reflection dielectric coatings designed for that wavelength. Because of the low-loss reflectors used in the cell, a high number of traversals, reflections, can be achieved; R ≥ 239. The use of dielectric mirrors also improves the damage resistance of the apparatus which is important when a uv laser beam is used.

The results of reflectance measurements performed on several ultraviolet high reflectors are also reported. These include conventional dielectric coatings as well as a hybrid coating consisting of Al²O³, HfO², and SiO² layers.