|
SEDL / STP / STP1015-EB / STP18779S
Effect of Molecular Fluorine on the Performance of Excimer Laser Optics
Foltyn, SR Los Alamos National Laboratory,
Jolin, LJ Los Alamos National Laboratory,
Lindholm, G Los Alamos National Laboratory,
Pages: 1 Published: Jan 1988
Download this paper for $25
PDF (16K)
View License Agreement
Abstract
Keywords:
Excimer lasers, fluorine degradation, laser damage, ultraviolet laser coatings
Paper ID: STP18779S
Committee/Subcommittee: F01.11
DOI: 10.1520/STP18779S
ASTM International is a member of CrossRef.
|