STP1015

    Effect of Molecular Fluorine on the Performance of Excimer Laser Optics

    Published: Jan 1988


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    Abstract

    Keywords:

    Excimer lasers, fluorine degradation, laser damage, ultraviolet laser coatings


    Author Information:

    Foltyn, SR
    Los Alamos National Laboratory,

    Jolin, LJ
    Los Alamos National Laboratory,

    Lindholm, G
    Los Alamos National Laboratory,


    Paper ID: STP18779S

    Committee/Subcommittee: F01.11

    DOI: 10.1520/STP18779S


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