SEDL / STP / STP1015-EB / STP18779S

Effect of Molecular Fluorine on the Performance of Excimer Laser Optics

Foltyn, SR
Los Alamos National Laboratory,

Jolin, LJ
Los Alamos National Laboratory,

Lindholm, G
Los Alamos National Laboratory,

Pages: 1    Published: Jan 1988

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Abstract

Keywords:
Excimer lasers, fluorine degradation, laser damage, ultraviolet laser coatings

Paper ID: STP18779S
Committee/Subcommittee: F01.11
DOI: 10.1520/STP18779S
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