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Effect of Molecular Fluorine on the Performance of Excimer Laser Optics Pages: 1 Published: Jan 1988
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View License Agreement Source: STP1015-EB Abstract Keywords: Excimer lasers, fluorine degradation, laser damage, ultraviolet laser coatings Paper ID: STP18779S Committee/Subcommittee: F01.11 DOI: 10.1520/STP18779S ASTM International is a member of CrossRef. | ||