SEDL / STP / STP1015-EB / STP18770S

Ion Beam Characterization of Multi-Layer Dielectric Reflectors

Beery, JG
Los Alamos National Laboratory, Los Alamos, NM

Hollander, MG
Los Alamos National Laboratory, Los Alamos, NM

Maggiore, CJ
Los Alamos National Laboratory, Los Alamos, NM

Redondo, A
Los Alamos National Laboratory, Los Alamos, NM

Westervelt, RT
Los Alamos National Laboratory, Los Alamos, NM

Taylor, TN
Los Alamos National Laboratory, Los Alamos, NM

Pages: 7    Published: Jan 1988

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Abstract

Energetic ion beams were used to characterize multilayer dielectric reflectors. Alpha-particle beams with beam spot sizes between 10 microns and a few millimeters were scattered from reflectors consisting of 32-layer SiO²/HfO² and 38-layer MgF²/ThF⁴. The RBS spectra reveal the nature of the laser damage processes by providing information on diffusion, mixing, and loss of material in the coatings. The particle-induced x-ray emission (PIXE) technique gave complimentary results on low-concentration impurities in the coatings.