SYMPOSIA PAPER Published: 01 January 1988
STP18770S

Ion Beam Characterization of Multi-Layer Dielectric Reflectors

Source

Energetic ion beams were used to characterize multilayer dielectric reflectors. Alpha-particle beams with beam spot sizes between 10 microns and a few millimeters were scattered from reflectors consisting of 32-layer SiO2/HfO2 and 38-layer MgF2/ThF4. The RBS spectra reveal the nature of the laser damage processes by providing information on diffusion, mixing, and loss of material in the coatings. The particle-induced x-ray emission (PIXE) technique gave complimentary results on low-concentration impurities in the coatings.

Author Information

Beery, JG
Hollander, MG
Maggiore, CJ
Redondo, A
Westervelt, RT
Taylor, TN
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Details
Developed by Committee: F01
Pages: 355–361
DOI: 10.1520/STP18770S
ISBN-EB: 978-0-8031-5031-7
ISBN-13: 978-0-8031-4479-8