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Self-Consistent Dependence of Porosity and Refractive Index on Composition in Co-Evaporated Films
Feldman, A
Institute for Materials Science and Engineering National Bureau of Standards, MD

Farabaugh, EN
Institute for Materials Science and Engineering National Bureau of Standards, MD

Stempniak, RA
Guest worker, Instituto Tecnologico de Aeronautica,


Pages: 6    Published: Jan 1988


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Source: STP1015-EB


Abstract

Zirconia:silica films grown by e-beam coevaporation show a decreased porosity compared to pure zirconia films. This decreased porosity causes an anomalous dependence of refractive index on composition. A maximum in refractive index occurs at about 20 percent by volume of silica, the concentration at which the films appear to become amorphous. A simple model which derives the porosity as a function of composition from the deposition parameters predicts the general compositional behavior of the refractive index. The results agree best with the Drude model of refractive index for mixed component systems.


Keywords:
coevaporation, porosity, refractive index, thin films, ZrO2, SiO2

Paper ID: STP18760S
Committee/Subcommittee: F01.19
DOI: 10.1520/STP18760S
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