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Multifacet, Metal Mirror Design for Extreme-Ultraviolet and Soft X-Ray Free-Electron Laser Resonators Pages: 9 Published: Jan 1988
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View License Agreement Source: STP1015-EB Abstract Resonator mirrors with reflectance greater than ~40% are required if free-electron laser (FEL) oscillators are to be extended to wavelengths below 100 nm. The principle of total-external reflection has been used to design multifacet mirrors of several metal films that surpass this requirement between 10 and 100 nm. These reflectors have high reflectance over a relatively broad band which suits well the inherent FEL wavelength tunability. The practical limitations to achieving and maintaining high reflectance include oxide- and carbon-contamination, scattering, and surface-plasmon absorption. Keywords: aluminum films, carbon contamination, extreme-ultraviolet reflectors, free-electron lasers, metal reflectors, multifacet reflectors, oxide contamination, rhodium films, silicon carbon, silicon films, soft x-ray reflectors Paper ID: STP18753S Committee/Subcommittee: F01.02 DOI: 10.1520/STP18753S ASTM International is a member of CrossRef. | ||