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Laser Mirror Profilometry by High-Q Interferometry Pages: 4 Published: Jan 1988
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View License Agreement Source: STP1015-EB Abstract A novel interferometric technique is described which exploits the relationship between an optical resonator's length and resonant frequency. This concept has potential for measuring length variations of an order of « l Λ. This paper briefly describes the concept, the experiment performed to demonstrate the concept, and the experimental, results. Results obtained indicate a repeatability in the measured data to ∼/5 Λ rms. Keywords: heterodyne interferometer, interferometry, laser mirror profilometry, mirror figure, profilometry, surface figure Paper ID: STP18726S Committee/Subcommittee: F01.19 DOI: 10.1520/STP18726S ASTM International is a member of CrossRef. | ||