STP1028: Super-Polished Single Crystal Molybdenum Mirror for XUV ∼ X-Ray Radiation

    Yoshida, K
    Institute of Laser Engineering, Osaka University, Osaka,

    Takeuchi, K
    Institute of Laser Engineering, Osaka University, Osaka,

    Kato, Y
    Institute of Laser Engineering, Osaka University, Osaka,

    Fujiwara, E
    Institute of Laser Engineering, Osaka University, Osaka,

    Yamanaka, C
    Institute of Laser Engineering, Osaka University, Osaka,

    Yamashita, K
    Institute of Laser Engineering, Osaka University, Osaka,

    Kurosawa, K
    Institute of Laser Engineering, Osaka University, Osaka,

    Sasaki, W
    Institute of Laser Engineering, Osaka University, Osaka,

    Uehara, K
    Institute of Laser Engineering, Osaka University, Osaka,

    Okamoto, H
    Institute of Laser Engineering, Osaka University, Osaka,

    Pages: 7    Published: Jan 1988


    Abstract

    High quality single crystal molybdenum (Mo) fabricated by secondary recrystallization method has been polished with a new polishing technique. The super-polished surface of the Mo single crystal has the surface roughness of 3.5Årms. THis super-polished single crystal Mo has been used for a high power electron-beam pumped argon excimer laser (λ=126nm) as a cavity mirror. Peak output power of more than 3MW has been achieved without any damage on the mirror surface for the first time.

    Keywords:

    super-polished single crystal Mo, electron-beam pumped argon excimer laser, surface roughness, laser damage


    Paper ID: STP18593S

    Committee/Subcommittee: E13.06

    DOI: 10.1520/STP18593S


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