SEDL / STP / STP1028-EB / STP18593S

Super-Polished Single Crystal Molybdenum Mirror for XUV ∼ X-Ray Radiation

Yoshida, K
Institute of Laser Engineering, Osaka University, Osaka,

Takeuchi, K
Institute of Laser Engineering, Osaka University, Osaka,

Kato, Y
Institute of Laser Engineering, Osaka University, Osaka,

Fujiwara, E
Institute of Laser Engineering, Osaka University, Osaka,

Yamanaka, C
Institute of Laser Engineering, Osaka University, Osaka,

Yamashita, K
Institute of Laser Engineering, Osaka University, Osaka,

Kurosawa, K
Institute of Laser Engineering, Osaka University, Osaka,

Sasaki, W
Institute of Laser Engineering, Osaka University, Osaka,

Uehara, K
Institute of Laser Engineering, Osaka University, Osaka,

Okamoto, H
Institute of Laser Engineering, Osaka University, Osaka,

Pages: 7    Published: Jan 1988

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Abstract

High quality single crystal molybdenum (Mo) fabricated by secondary recrystallization method has been polished with a new polishing technique. The super-polished surface of the Mo single crystal has the surface roughness of 3.5Årms. THis super-polished single crystal Mo has been used for a high power electron-beam pumped argon excimer laser (λ=126nm) as a cavity mirror. Peak output power of more than 3MW has been achieved without any damage on the mirror surface for the first time.