SEDL / STP / STP1028-EB / STP18579S

Nondestructive Depth Profiling of Optically Transparent Films by Spectroscopic Ellipsometry

Vedam, K
The Pennsylvania State University, University Park, PA

Kim, SY
The Pennsylvania State University, University Park, PA

D'Aries, L
The Pennsylvania State University, University Park, PA

Guenther, AH
The Pennsylvania State University, University Park, PA

Pages: 5    Published: Jan 1988

Download this paper for $25 PDF (116K)          View License Agreement
Abstract

Spectroscopic ellipsometric (SE) measurements followed by linear regression analysis of the SE data obtained on optically transparent thin films of ZnS and MgO on vitreous silica substrates, reveal the distribution of voids (or low density regions) in these thin films.