STP1028: Nondestructive Depth Profiling of Optically Transparent Films by Spectroscopic Ellipsometry

    Vedam, K
    The Pennsylvania State University, University Park, PA

    Kim, SY
    The Pennsylvania State University, University Park, PA

    D'Aries, L
    The Pennsylvania State University, University Park, PA

    Guenther, AH
    The Pennsylvania State University, University Park, PA

    Pages: 5    Published: Jan 1988


    Abstract

    Spectroscopic ellipsometric (SE) measurements followed by linear regression analysis of the SE data obtained on optically transparent thin films of ZnS and MgO on vitreous silica substrates, reveal the distribution of voids (or low density regions) in these thin films.

    Keywords:

    Depth profile, thin films, voids, spectroscopic ellipsometry


    Paper ID: STP18579S

    Committee/Subcommittee: E13.01

    DOI: 10.1520/STP18579S


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