SEDL / STP / STP1028-EB / STP18549S

Comparison of Frequency Response Characteristics of an Optical Scatterometer and a Mechanical Profilometer

Wilson, SR
Center for High Technology Materials The University of New Mexico, Albuquerque, NM

Al-Jumaily, GA
Center for High Technology Materials The University of New Mexico, Albuquerque, NM

McNeil, JR
Center for High Technology Materials The University of New Mexico, Albuquerque, NM

Pages: 13    Published: Jan 1988

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Abstract

The frequency response characteristics of an angle-resolved optical scatterometer and a mechanical profilometer are examined. The transfer function for the scatterometer is found to be constant within the spatial frequency bandwidth of the system. The mechanical profilometer is found to have a nonlinear, lowpass-like response. A computational model is used to examine the effects of the nonlinear stylus response on realistic surfaces.