STP1028

    Comparison of Frequency Response Characteristics of an Optical Scatterometer and a Mechanical Profilometer

    Published: Jan 1988


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    Abstract

    The frequency response characteristics of an angle-resolved optical scatterometer and a mechanical profilometer are examined. The transfer function for the scatterometer is found to be constant within the spatial frequency bandwidth of the system. The mechanical profilometer is found to have a nonlinear, lowpass-like response. A computational model is used to examine the effects of the nonlinear stylus response on realistic surfaces.

    Keywords:

    optical, profilometer, scatter, scatterometer, spatial frequency response, stylus


    Author Information:

    Wilson, SR
    Center for High Technology Materials The University of New Mexico, Albuquerque, NM

    Al-Jumaily, GA
    Center for High Technology Materials The University of New Mexico, Albuquerque, NM

    McNeil, JR
    Center for High Technology Materials The University of New Mexico, Albuquerque, NM


    Paper ID: STP18549S

    Committee/Subcommittee: F01.19

    DOI: 10.1520/STP18549S


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