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The Effect of Crystal Orientation on Damage Accumulation in Chromium-Implanted Al2O3 Pages: 9 Published: Jan 1992
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View License Agreement Source: STP1125-EB Abstract Chromium-implantation of single crystal aluminum oxide (Al2O3) has been shown to be anisotropic with respect to damage accumulation. Ultra-low load indentation and Rutherford backscattering spectroscopy (RBS) have been used to demonstrate the dependence of radiation damage on fluence and crystal orientation. Single crystal Al2O3) specimens of c-axis ([0001] normal to the surface) and a-axis ([1120] normal to the surface) orientations were ion-implanted simultaneously at room temperature with chromium ions of 160-keV energy to flu-ences up to 6 × 1017 ions cm~2. The implanted specimens were found to possess different near-surface mechanical properties. Subsequent RBS-ion channeling examination indicated different amounts of disorder in both the aluminum and oxygen sublattices for the two orientations. These results imply a higher amorphization threshold in terms of implantation fluence for the a-axis oriented samples. Keywords: ceramics, alumina, ion implantation, mechanical properties, sapphire, Al, 2, O, 3 Paper ID: STP17907S Committee/Subcommittee: E10.08 DOI: 10.1520/STP17907S ASTM International is a member of CrossRef. | ||