SEDL / STP / STP1340-EB / STP15689S

Overview

Gupta, D
Symposium chairman and co-editor, Mitsubishi Silicon America Palo Alto, CA

Backer, FR
Symposium co-chairman and co-editor, Wacker Siltronic Corp., Portland, OR

Hughes, W
Symposium co-chairman and co-editor, MEMC Electronics Materials Inc., St. Peters, MO

Pages: 2    Published: Jan 1998

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Abstract

Paper ID: STP15689S
Committee/Subcommittee: F01.06
DOI: 10.1520/STP15689S
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