STP1340

    Overview

    Published: Jan 1998


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    Abstract


    Author Information:

    Gupta, D
    Symposium chairman and co-editor, Mitsubishi Silicon America Palo Alto, CA

    Backer, FR
    Symposium co-chairman and co-editor, Wacker Siltronic Corp., Portland, OR

    Hughes, W
    Symposium co-chairman and co-editor, MEMC Electronics Materials Inc., St. Peters, MO


    Paper ID: STP15689S

    Committee/Subcommittee: F01.06

    DOI: 10.1520/STP15689S


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