STP1413

    Fatigue and Fracture in Membranes for MEMS Power Generation

    Published: Jan 2001


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    Abstract

    Bulk micromachined membranes containing PZT thin films deposited via sol-gel processing have been tested for fatigue and fracture using a dynamic bulge testing apparatus. These membranes, consisting of silicon, titanium, platinum, PZT, and gold, were pressurized monotonically until failure to determine an average failure pressure and then cyclically pressurized to examine fatigue behavior. Membranes containing PZT show significant degradation of strength as compared to membranes of just silicon or the metallic layers. This is discussed in terms of the residual stresses and defects present in the PZT thin film due to thermal processing. Fractography of the failed membranes shows that delamination does occur at the metal-silicon interface during both types of loading, suggesting both through- thickness and interfacial cracking are possible failure mechanisms in this system.

    Keywords:

    fatigue, fracture, MEMS devices, bulge testing, PZT Introduction


    Author Information:

    Bahr, DF
    Mechanical and Materials Engineering, Washington State University, Pullman, WA

    Crozier, BT
    Mechanical and Materials Engineering, Washington State University, Pullman, WA

    Richards, CD
    Mechanical and Materials Engineering, Washington State University, Pullman, WA

    Richards, RF
    Mechanical and Materials Engineering, Washington State University, Pullman, WA


    Paper ID: STP10978S

    Committee/Subcommittee: E08.05

    DOI: 10.1520/STP10978S


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