MICROTRIBOLOGY IS A KEY SCIENCE AND TECHnology for micro-electromechanical systems (MEMS), high density magnetic recording system, micro-robot, etc. Also, it is important for developing new micro devices and for understanding the origins of friction and wear (1,2). The ultimate goal of microtribology research is to create practical zero-wear micro devices. Microtribology consists of microfriction, microwear, and microlubrication, while microfriction and wear plays an important role in microtribology.