MNL33

    Chapter 6: Hydrolysis of Chlorosilanes

    Published: Mar 1998

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    Abstract

    The purpose of this procedure is to provide general guidelines concerning methods for hydrolyzing chlorosilane after the initial mitigation procedure.


    Paper ID: MNL10550M

    Committee/Subcommittee: F20.23

    DOI: 10.1520/MNL10550M


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    ISBN10: 0-8031-2076-1
    ISBN13: 978-0-8031-2076-1