SEDL / Manuals, Monographs and Data Series / MNL33-EB / MNL10550M

Chapter 6: Hydrolysis of Chlorosilanes

Pages: 3    Published: Mar 1998

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Source: MNL33-EB

Abstract

The purpose of this procedure is to provide general guidelines concerning methods for hydrolyzing chlorosilane after the initial mitigation procedure.

Paper ID: MNL10550M
Committee/Subcommittee: F20.23
DOI: 10.1520/MNL10550M
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ISBN10: 0-8031-2076-1
ISBN13: 978-0-8031-2076-1