Application of an Optical Heterodyne Interferometer to the Inspection of Surfaces

    Volume 5, Issue 5 (September 1977)

    ISSN: 0090-3973

    CODEN: JTEOAD

    Page Count: 2


    Lavan, MJ
    Research physicists, Research Directorate, Gen. Thomas J. Rodman Laboratory, Rock Island Arsenal, Rock Island, Ill.

    Van Damme, GE
    Research physicists, Research Directorate, Gen. Thomas J. Rodman Laboratory, Rock Island Arsenal, Rock Island, Ill.

    Cadwallender, WK
    Research physicists, Research Directorate, Gen. Thomas J. Rodman Laboratory, Rock Island Arsenal, Rock Island, Ill.

    DeYoung, TF
    Research physicists, Research Directorate, Gen. Thomas J. Rodman Laboratory, Rock Island Arsenal, Rock Island, Ill.

    Abstract

    The application of a high accuracy, wide bandwidth optical heterodyne interferometer to the inspection of surfaces is described and sample data are given. The data format should make the system particularly suitable for automatic inspection systems.


    Paper ID: JTE10546J

    DOI: 10.1520/JTE10546J

    ASTM International is a member of CrossRef.

    Author
    Title Application of an Optical Heterodyne Interferometer to the Inspection of Surfaces
    Symposium , 0000-00-00
    Committee E42