Volume 5, Issue 5 (September 1977)

    Application of an Optical Heterodyne Interferometer to the Inspection of Surfaces

    CODEN: JTEOAD

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    Abstract

    The application of a high accuracy, wide bandwidth optical heterodyne interferometer to the inspection of surfaces is described and sample data are given. The data format should make the system particularly suitable for automatic inspection systems.


    Author Information:

    Lavan, MJ
    Research physicists, Research Directorate, Gen. Thomas J. Rodman Laboratory, Rock Island Arsenal, Rock Island, Ill.

    Van Damme, GE
    Research physicists, Research Directorate, Gen. Thomas J. Rodman Laboratory, Rock Island Arsenal, Rock Island, Ill.

    Cadwallender, WK
    Research physicists, Research Directorate, Gen. Thomas J. Rodman Laboratory, Rock Island Arsenal, Rock Island, Ill.

    DeYoung, TF
    Research physicists, Research Directorate, Gen. Thomas J. Rodman Laboratory, Rock Island Arsenal, Rock Island, Ill.


    Stock #: JTE10546J

    ISSN: 0090-3973

    DOI: 10.1520/JTE10546J

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    Author
    Title Application of an Optical Heterodyne Interferometer to the Inspection of Surfaces
    Symposium , 0000-00-00
    Committee E42