Volume 1, Issue 3 (May 1973)
Auger Electron Spectroscopy in the Scanning Electron Microscope
Recent work devoted to high-spatial resolution (submicron) chemical analysis of solid surfaces by using Auger electron spectroscopy (AES) in a scanning electron microscope (SEM) is reviewed. Particular attention is given to the description of a computerized AES-SEM system and its use. Examples of applications are given, with emphasis on those in the fields of metallurgy and solid-state semiconductor devices.