Journal Published Online: 01 May 1973
Volume 1, Issue 3

Auger Electron Spectroscopy in the Scanning Electron Microscope

CODEN: JTEVAB

Abstract

Recent work devoted to high-spatial resolution (submicron) chemical analysis of solid surfaces by using Auger electron spectroscopy (AES) in a scanning electron microscope (SEM) is reviewed. Particular attention is given to the description of a computerized AES-SEM system and its use. Examples of applications are given, with emphasis on those in the fields of metallurgy and solid-state semiconductor devices.

Author Information

Waldrop, JR
North American Rockwell Science Center, Thousand Oaks, Calif.
Marcus, HL
North American Rockwell Science Center, Thousand Oaks, Calif.
Pages: 8
Price: $25.00
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Details
Stock #: JTE10003J
ISSN: 0090-3973
DOI: 10.1520/JTE10003J