Volume 1, Issue 3 (May 1973)

    Auger Electron Spectroscopy in the Scanning Electron Microscope

    CODEN: JTEOAD

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    Abstract

    Recent work devoted to high-spatial resolution (submicron) chemical analysis of solid surfaces by using Auger electron spectroscopy (AES) in a scanning electron microscope (SEM) is reviewed. Particular attention is given to the description of a computerized AES-SEM system and its use. Examples of applications are given, with emphasis on those in the fields of metallurgy and solid-state semiconductor devices.


    Author Information:

    Waldrop, JR
    North American Rockwell Science Center, Thousand Oaks, Calif.

    Marcus, HL
    North American Rockwell Science Center, Thousand Oaks, Calif.


    Stock #: JTE10003J

    ISSN: 0090-3973

    DOI: 10.1520/JTE10003J

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    Author
    Title Auger Electron Spectroscopy in the Scanning Electron Microscope
    Symposium , 0000-00-00
    Committee E42