ISSN: 1945-7553
CODEN: JTEVAB
Page Count: 8

Auger Electron Spectroscopy in the Scanning Electron Microscope

Waldrop, JR
North American Rockwell Science Center, Thousand Oaks, Calif.

Marcus, HL
North American Rockwell Science Center, Thousand Oaks, Calif.

Abstract

Recent work devoted to high-spatial resolution (submicron) chemical analysis of solid surfaces by using Auger electron spectroscopy (AES) in a scanning electron microscope (SEM) is reviewed. Particular attention is given to the description of a computerized AES-SEM system and its use. Examples of applications are given, with emphasis on those in the fields of metallurgy and solid-state semiconductor devices.

Keywords:
Auger electrons, spectroscopy, scanning, electron microscopes, microanalysis, surface chemistry, analyzing, electron probes

Paper ID: JTE10003J
DOI: 10.1520/JTE10003J
ASTM International is a member of CrossRef.