ISSN: 0090-3973
Published Online: 22 March 2006
Page Count: 5

Evaluation of Residual Stress in Fiber-Textured Films by X-ray Diffraction
Zhang, J-M
College of Physics and Information Technology, Shannxi Normal University, Shaanxi

Xu, K-W
State Key Laboratory for Mechanical Behavior of Materials. Xian Jiaotong University, Shaanxi

Ji, V
LIM UMR 8006 ENSAM 151 bd. de L'Hôpital,

(Received 28 October 2004; accepted 25 January 2006)

Abstract

The X-ray method is used extensively to determine the residual stress in bulk or thin film materials on the assumptions that the material is composed of fine crystals with random orientation and the stress state is biaxial and homogeneous through the X-ray penetrating region. But the method cannot be used in textured films due to oscillations in ε -sin² Ψ relation. In this paper, a new method is proposed for measuring residual stress in cubic films with any [hkl] fiber texture.

Keywords:
thin film, fiber texture, residual stress, X-ray diffraction

Paper ID: JTE13113
DOI: 10.1520/JTE13113
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